Specifications

• 6-inch stage vacuum chamber — capable of handling 8-inch wafers
• 23 free accessory ports leave nothing to be desired
• dedicated cryogenic transfer port for easy examination of deep-frozen specimen
• safeguarded upgrade path from a stand-alone SEM to a fully equipped FIB-SEM allowing to reflect on the individual customers needs and budgetary capabilities

Target customers:
Even without having broadly marketed AURIGA 60 so far, there are already several orders from early customers. This clearly shows that we have entered a market with promising opportunities. Based on these orders and discussions with current customers, we anticipate the following prospective customers:

• customers in a multipurpose environment (like institutes doing life science research as well as materials analysis)
• customers with a clear upgrade strategy
• customers with limited budget but ambitious goals for their system inventory

Unbeatable combination:

AURIGA 60 in itself already is absolutely unique in the market, together with our sophisticated software & hardware packages like

• ATLAS
• Nano patterning engine

to name but a few, unbeatable combinations for a multitude of applications are offered.

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