ZEISS AURIGA™ specifications

Does working with your sample cover more than just imaging of the surface? Would you also like to know about the chemical composition or the morphology of your sample? Are you curios about in-depth 3D volume characteristics? Or do you even plan to modify or process your sample?

Information Beyond Resolution

Unique Imaging
Advanced Analytics
Precise Processing
Future Assured

AURIGA™ the new CrossBeam® Workstation (FIB-SEM) from Carl Zeiss SMT exactly delivers all this – on a nanoscopic scale. Using the best-in-class FIB column and the proprietary GEMINI e-Beam column from Carl Zeiss, together with a completely new designed vacuum chamber for advanced analytics, AURIGA™ assists you in obtaining the maximum information possible out of your sample.

GEMINI ^® Electron Optical Column

· Schottky type field emission system, single condenser with crossover-free beam path

· Resolution 1.0 nm at 15 kV; 1.9 nm at 1 kV (optimal working distance)

· 100 V to 30 kV accelerating voltage

· Beam current up to 20 nA (80 nA optional)

· Magnetic/electrostatic GEMINI^® objective lens assembly with 68 degrees cone angle

· Anti-vibration isolation system

· Scan rotation, dynamic focus, tilt correction

Detectors

· Chamber mounted Everhart-Thornley secondary electron detector

· High efficiency In-lens SE-detector system

· Real-time automatic contrast/brightness and manual override

· Specimen Current Monitor
Auto ranging allowing accurate current measurement from 1 pA to 10 mA

· Two chamber scopes with IR-illumination

Cobra FIB Column (option)

· Gallium liquid metal ion source with long life-time

· Resolution better than 2.5 nm

· Energy range 1 kV – 30 kV

· Beam current 1 pA to 50 nA

· Mechanical XY and tilt motion for source alignment

· Optimized two lens ion optics

· Electrostatic beam blanker

· Differential pumping system

· Motorised FIB aperture alignment with ultra high reproducibility

· 13 aperture positions

CANION 31 FIB Column (standard)